Designing and Simulating a ±16g Micromachined Accelerometer with Enhanced Parameters for Automotive Navigation

Abstract

This research aims to design and simulate a single-axis capacitive accelerometer using surface micromachining technology for detecting accelerations in the range of ±16g, with applications in automotive navigation systems. The overall dimensions of the accelerometer are , , its initial capacitance is , its capacitance sensitivity is , and its resolution is . To reduce the effects of residual stress, a fully symmetric structure is employed. Considering the pull-in phenomenon and innovative spring design, the maximum displacement of the moving mass is utilized to enhance the capacitance, ensuring that the system operates within the linear range. The proposed structure's advantages include the use of a differential structure to eliminate environmental noise and linearize the output. Due to the single-axis nature of the accelerometer, appropriate spring design prevents axis interference during acceleration measurement. The implementation of surface micromachining technology enables the simultaneous fabrication of the accelerometer and its processing circuit on a single die. This approach reduces manufacturing costs while improving sensor accuracy and sensitivity. The design and simulation of the proposed accelerometer were carried out using COMSOL Multiphysics 5.6 and MATLAB software.

Keywords: Capacitive accelerometer, surface micromachining, COMSOL software, MATLAB software